The device (LPS001WP) is fabricated using a proprietary ST technology called "VENSENS" that allows the pressure sensor to be fabricated on a monolithic silicon chip. Manufacturing the device in this way is said to eliminate wafer-to-wafer bonding and maximizes reliability. The size of this MEMS is 3x5x1 mm.
STMicro announced last week it has shipped its one billionth MEMS sensor. According to iSuppli (H2 2010) STMicro is the leading worldwide vendor of MEMS sensors for consumer and portable applications.